Equipments
For Deposition & Device Fabrication
Tube-type ALD/ALE Reactor-1
Deposition/etching/surface treatment
Tube-type ALD/ALE Reactor-2
Under construction
ALD reactor for Nobel Metal
Deposition for Pt, Ru, etc.
Under construction
For Characterization
Probe Station
Coming soon
Ellipsometry
Coming soon
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