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Advanced Semiconductor Processing Laboratory

Mar. 2025. A paper titled “Thermal Atomic Layer Etching of Zinc Oxide from 30-300 °C Using Sequential Exposures of Hydrogen Fluoride and Trimethylgallium” has been accepted for publication in Chemistry of Materials !

Feb. 2025. Minseob Lee and Jonghyuk Park joined the group!

Sep. 2024. Prof. Nam joined Sejong University