Equipments

For Deposition & Device Fabrication

Tube-type ALD/ALE Reactor-1

Deposition/etching/surface treatment

Tube-type ALD/ALE Reactor-2

Under construction

ALD reactor for Nobel Metal

Deposition for Pt, Ru, etc.
Under construction

Ozone Generator

For deposition, cleaning, and surface treatment

–

–

–

–

For Characterization

Probe Station

Coming soon

Ellipsometry

Coming soon

–

–